TiO2 and Al2O3 ALD Grown Multilayers for Subwavelength Photonics

Evgeniy Shkondin; Flemming Jensen; Andrei Lavrinenko; Mikkel Dysseholm Mar; Pernille Voss Larsen; Radu Malureanu; Sergei V. Zhukovsky; Andrei A. Andryieuski; Osamu Takayama

TiO₂ and Al₂O₃ ALD Grown Multilayers for Subwavelength Photonics

Evgeniy Shkondin, Flemming Jensen, Andrei Lavrinenko, Mikkel Dysseholm Mar, Pernille Voss Larsen, Radu Malureanu, Sergei V. Zhukovsky, Andrei A. Andryieuski, Osamu Takayama

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Research › peer-review

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Original language	English
Title of host publication	Book of Abstracts. DTU's Sustain Conference 2015
Number of pages	1
Place of Publication	Lyngby
Publisher	Technical University of Denmark
Publication date	2015
Article number	P-11
Publication status	Published - 2015
Event	DTU Sustain Conference 2015 - DTU, Lyngby, Denmark Duration: 17 Dec 2015 → 17 Dec 2015 https://sustain.dtu.dk/about/sustain-2015

Conference

Conference	DTU Sustain Conference 2015
Location	DTU
Country/Territory	Denmark
City	Lyngby
Period	17/12/2015 → 17/12/2015
Internet address	https://sustain.dtu.dk/about/sustain-2015

Bibliographical note

Poster presentation

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P11 DTU Sustain 2015Final published version, 223 KB

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Cite this

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title = "TiO2 and Al2O3 ALD Grown Multilayers for Subwavelength Photonics",

author = "Evgeniy Shkondin and Flemming Jensen and Andrei Lavrinenko and Mar, {Mikkel Dysseholm} and Larsen, {Pernille Voss} and Radu Malureanu and Zhukovsky, {Sergei V.} and Andryieuski, {Andrei A.} and Osamu Takayama",

note = "Poster presentation; DTU Sustain Conference 2015 ; Conference date: 17-12-2015 Through 17-12-2015",

year = "2015",

language = "English",

booktitle = "Book of Abstracts. DTU's Sustain Conference 2015",

publisher = "Technical University of Denmark",

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TY - ABST

T1 - TiO2 and Al2O3 ALD Grown Multilayers for Subwavelength Photonics

AU - Shkondin, Evgeniy

AU - Jensen, Flemming

AU - Lavrinenko, Andrei

AU - Mar, Mikkel Dysseholm

AU - Larsen, Pernille Voss

AU - Malureanu, Radu

AU - Zhukovsky, Sergei V.

AU - Andryieuski, Andrei A.

AU - Takayama, Osamu

N1 - Poster presentation

PY - 2015

Y1 - 2015

M3 - Conference abstract in proceedings

BT - Book of Abstracts. DTU's Sustain Conference 2015

PB - Technical University of Denmark

CY - Lyngby

T2 - DTU Sustain Conference 2015

Y2 - 17 December 2015 through 17 December 2015

ER -