TiO2 and Al2O3 ALD Grown Multilayers for Subwavelength Photonics

Evgeniy Shkondin, Flemming Jensen, Andrei Lavrinenko, Mikkel Dysseholm Mar, Pernille Voss Larsen, Radu Malureanu, Sergei V. Zhukovsky, Andrei A. Andryieuski, Osamu Takayama

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsResearchpeer-review

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    Original languageEnglish
    Title of host publicationBook of Abstracts. DTU's Sustain Conference 2015
    Number of pages1
    Place of PublicationLyngby
    PublisherTechnical University of Denmark
    Publication date2015
    Article numberP-11
    Publication statusPublished - 2015
    EventDTU Sustain Conference 2015 - DTU, Lyngby, Denmark
    Duration: 17 Dec 201517 Dec 2015
    https://sustain.dtu.dk/about/sustain-2015

    Conference

    ConferenceDTU Sustain Conference 2015
    LocationDTU
    Country/TerritoryDenmark
    CityLyngby
    Period17/12/201517/12/2015
    Internet address

    Bibliographical note

    Poster presentation

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