THz based ultrahigh temperature measurement of Silicon

Daena Madhi; Asger Kjærgard Pedersen; Daniil Mirosnikov; Dirch Hjorth Petersen; Peter Uhd Jepsen

doi:10.1109/IRMMW-THz46771.2020.9370616

THz based ultrahigh temperature measurement of Silicon

Daena Madhi, Asger Kjærgard Pedersen, Daniil Mirosnikov, Dirch Hjorth Petersen, Peter Uhd Jepsen

Topsil GlobalWafers A/S

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Abstract

We present the temperature dependence of the reflectivity of silicon in the THz range. These are the first attempts, to our knowledge, of implementing THz technology to make a noncontact thermometer for semiconductors.

Original language	English
Title of host publication	45th International Conference on Infrared, Millimeter, and Terahertz Waves (irmmw-thz)
Number of pages	1
Publisher	IEEE
Publication date	2020
ISBN (Electronic)	978-1-7281-6620-9/20
DOIs	https://doi.org/10.1109/IRMMW-THz46771.2020.9370616
Publication status	Published - 2020
Event	45^th International Conference on Infrared, Millimeter, and Terahertz Waves - Virtual event, Buffalo, United States Duration: 8 Nov 2020 → 13 Nov 2020 Conference number: 45

Conference

Conference	45^th International Conference on Infrared, Millimeter, and Terahertz Waves
Number	45
Location	Virtual event
Country/Territory	United States
City	Buffalo
Period	08/11/2020 → 13/11/2020

Access to Document

10.1109/IRMMW-THz46771.2020.9370616

OpenUrl availability

Full text

Cite this

@inproceedings{c0e061359b464f779d381c9dd4fae451,

title = "THz based ultrahigh temperature measurement of Silicon",

abstract = "We present the temperature dependence of the reflectivity of silicon in the THz range. These are the first attempts, to our knowledge, of implementing THz technology to make a noncontact thermometer for semiconductors.",

author = "Daena Madhi and Pedersen, {Asger Kj{\ae}rgard} and Daniil Mirosnikov and Petersen, {Dirch Hjorth} and Jepsen, {Peter Uhd}",

year = "2020",

doi = "10.1109/IRMMW-THz46771.2020.9370616",

language = "English",

booktitle = "45th International Conference on Infrared, Millimeter, and Terahertz Waves (irmmw-thz)",

publisher = "IEEE",

address = "United States",

note = "45<sup>th</sup> International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2020 ; Conference date: 08-11-2020 Through 13-11-2020",

}

Madhi, D, Pedersen, AK, Mirosnikov, D, Petersen, DH & Jepsen, PU 2020, THz based ultrahigh temperature measurement of Silicon. in 45th International Conference on Infrared, Millimeter, and Terahertz Waves (irmmw-thz). IEEE, 45^th International Conference on Infrared, Millimeter, and Terahertz Waves, Buffalo, New York, United States, 08/11/2020. https://doi.org/10.1109/IRMMW-THz46771.2020.9370616

TY - GEN

T1 - THz based ultrahigh temperature measurement of Silicon

AU - Madhi, Daena

AU - Pedersen, Asger Kjærgard

AU - Mirosnikov, Daniil

AU - Petersen, Dirch Hjorth

AU - Jepsen, Peter Uhd

N1 - Conference code: 45

PY - 2020

Y1 - 2020

N2 - We present the temperature dependence of the reflectivity of silicon in the THz range. These are the first attempts, to our knowledge, of implementing THz technology to make a noncontact thermometer for semiconductors.

AB - We present the temperature dependence of the reflectivity of silicon in the THz range. These are the first attempts, to our knowledge, of implementing THz technology to make a noncontact thermometer for semiconductors.

U2 - 10.1109/IRMMW-THz46771.2020.9370616

DO - 10.1109/IRMMW-THz46771.2020.9370616

M3 - Article in proceedings

BT - 45th International Conference on Infrared, Millimeter, and Terahertz Waves (irmmw-thz)

PB - IEEE

T2 - 45<sup>th</sup> International Conference on Infrared, Millimeter, and Terahertz Waves

Y2 - 8 November 2020 through 13 November 2020

ER -

THz based ultrahigh temperature measurement of Silicon

Abstract

Conference

Access to Document

OpenUrl availability

Fingerprint

Cite this