Three-dimensional microfabrication in negative resist using printed masks

Daniel Häfliger, Anja Boisen

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Journal of Micromechanics and Microengineering
Volume	16
Issue number	5
Pages (from-to)	951-957
ISSN	0960-1317
Publication status	Published - 2006

OpenUrl availability

@article{0deaf014f4a44562a4f8e6b29b611532,

title = "Three-dimensional microfabrication in negative resist using printed masks",

author = "Daniel H{\"a}fliger and Anja Boisen",

year = "2006",

language = "English",

volume = "16",

pages = "951--957",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing",

number = "5",

}