Three dimensional engineering of silicon micro- and nanostructures

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    96 Downloads (Pure)
    Original languageEnglish
    Publication date2018
    Publication statusPublished - 2018
    Event44th International conference on Micro and Nano Engineering - Copenhagen, Denmark
    Duration: 24 Sep 201827 Sep 2018
    Conference number: 44
    http://mne2018.org

    Conference

    Conference44th International conference on Micro and Nano Engineering
    Number44
    CountryDenmark
    CityCopenhagen
    Period24/09/201827/09/2018
    Internet address

    Cite this

    Chang, B., Jensen, F., Hübner, J., & Jansen, H. (2018). Three dimensional engineering of silicon micro- and nanostructures. Abstract from 44th International conference on Micro and Nano Engineering, Copenhagen, Denmark.