Three dimensional engineering of silicon micro- and nanostructures

    Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

    63 Downloads (Pure)
    Original languageEnglish
    Publication date2018
    Publication statusPublished - 2018
    Event44th International conference on Micro and Nano Engineering - Copenhagen, Denmark
    Duration: 24 Sep 201827 Sep 2018
    Conference number: 44
    http://mne2018.org

    Conference

    Conference44th International conference on Micro and Nano Engineering
    Number44
    CountryDenmark
    CityCopenhagen
    Period24/09/201827/09/2018
    Internet address

    Cite this

    Chang, B., Jensen, F., Hübner, J., & Jansen, H. (2018). Three dimensional engineering of silicon micro- and nanostructures. Abstract from 44th International conference on Micro and Nano Engineering, Copenhagen, Denmark.
    Chang, Bingdong ; Jensen, Flemming ; Hübner, Jörg ; Jansen, Henri. / Three dimensional engineering of silicon micro- and nanostructures. Abstract from 44th International conference on Micro and Nano Engineering, Copenhagen, Denmark.
    @conference{0926d668e1b24e9594c3281e030246ef,
    title = "Three dimensional engineering of silicon micro- and nanostructures",
    author = "Bingdong Chang and Flemming Jensen and J{\"o}rg H{\"u}bner and Henri Jansen",
    year = "2018",
    language = "English",
    note = "44th International conference on Micro and Nano Engineering, MNE 2018 ; Conference date: 24-09-2018 Through 27-09-2018",
    url = "http://mne2018.org",

    }

    Chang, B, Jensen, F, Hübner, J & Jansen, H 2018, 'Three dimensional engineering of silicon micro- and nanostructures' 44th International conference on Micro and Nano Engineering, Copenhagen, Denmark, 24/09/2018 - 27/09/2018, .

    Three dimensional engineering of silicon micro- and nanostructures. / Chang, Bingdong; Jensen, Flemming; Hübner, Jörg; Jansen, Henri.

    2018. Abstract from 44th International conference on Micro and Nano Engineering, Copenhagen, Denmark.

    Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

    TY - ABST

    T1 - Three dimensional engineering of silicon micro- and nanostructures

    AU - Chang, Bingdong

    AU - Jensen, Flemming

    AU - Hübner, Jörg

    AU - Jansen, Henri

    PY - 2018

    Y1 - 2018

    M3 - Conference abstract for conference

    ER -

    Chang B, Jensen F, Hübner J, Jansen H. Three dimensional engineering of silicon micro- and nanostructures. 2018. Abstract from 44th International conference on Micro and Nano Engineering, Copenhagen, Denmark.