Three-Dimensional Characterization of X-ray Refractive Optics

Frederik Stöhr; Jonas Michael-Lindhard; Hugh Simons; Jörg Hübner; Flemming Jensen; Ole Hansen; Jørgen Garnæs; A. Snigirev; Henning Friis Poulsen

Three-Dimensional Characterization of X-ray Refractive Optics

Frederik Stöhr, Jonas Michael-Lindhard, Hugh Simons, Jörg Hübner, Flemming Jensen, Ole Hansen, Jørgen Garnæs, A. Snigirev, Henning Friis Poulsen

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Research › peer-review

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Original language	English
Title of host publication	Proceedings of the 40th International Conference on Micro and Nano Engineering
Number of pages	1
Publication date	2014
Publication status	Published - 2014
Event	40th International Conference on Micro and Nano Engineering - Lausanne, Switzerland Duration: 22 Sept 2014 → 26 Sept 2014 Conference number: 40 http://www.mne2014.org/

Conference

Conference	40th International Conference on Micro and Nano Engineering
Number	40
Country/Territory	Switzerland
City	Lausanne
Period	22/09/2014 → 26/09/2014
Internet address	http://www.mne2014.org/

Keywords

X-ray optics
Optical profilometry
Atomic force microscopy
Replica molding

Access to Document

MNE2014 St hr et al

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Cite this

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title = "Three-Dimensional Characterization of X-ray Refractive Optics",

keywords = "X-ray optics, Optical profilometry, Atomic force microscopy, Replica molding",

author = "Frederik St{\"o}hr and Jonas Michael-Lindhard and Hugh Simons and J{\"o}rg H{\"u}bner and Flemming Jensen and Ole Hansen and J{\o}rgen Garn{\ae}s and A. Snigirev and Poulsen, {Henning Friis}",

year = "2014",

language = "English",

booktitle = "Proceedings of the 40th International Conference on Micro and Nano Engineering",

note = "40th International Conference on Micro and Nano Engineering, MNE 2014 ; Conference date: 22-09-2014 Through 26-09-2014",

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TY - ABST

T1 - Three-Dimensional Characterization of X-ray Refractive Optics

AU - Stöhr, Frederik

AU - Michael-Lindhard, Jonas

AU - Simons, Hugh

AU - Hübner, Jörg

AU - Jensen, Flemming

AU - Hansen, Ole

AU - Garnæs, Jørgen

AU - Snigirev, A.

AU - Poulsen, Henning Friis

N1 - Conference code: 40

PY - 2014

Y1 - 2014

KW - X-ray optics

KW - Optical profilometry

KW - Atomic force microscopy

KW - Replica molding

M3 - Conference abstract in proceedings

BT - Proceedings of the 40th International Conference on Micro and Nano Engineering

T2 - 40th International Conference on Micro and Nano Engineering

Y2 - 22 September 2014 through 26 September 2014

ER -