Thin film Ag superlens towards lab-on-a-chip integration

Claus Jeppesen, Rasmus Bundgaard Nielsen, Alexandra Boltasseva, Sanshui Xiao, Asger Mortensen, Anders Kristensen

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Abstract

A thin metal film near-field superlens, as originally suggested by Pendry and realized by Fang et al. and Melville et al., is investigated with emphasis on materials suitable for integration on a lab-on-a-chip platform. A chemically resistant cyclo-olefin copolymer (COC), mr-I-T85 from microresist technology, is applied as dielectric matrix/spacer for an Ag thin film superlens. The superlens successfully resolves 80 nm half-pitch gratings when illuminated with UV radiation at a free space wavelength of 365 nm. The superlens design, fabrication and characterization is discussed.
Original languageEnglish
JournalOptics Express
Volume17
Issue number25
Pages (from-to)22543-22552
ISSN1094-4087
DOIs
Publication statusPublished - 2009

Bibliographical note

This paper was published in Optics Express and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://www.opticsinfobase.org/oe/abstract.cfm?uri=oe-17-25-22543. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.

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