Thickness determination of large-area films of yttria-stabilized zirconia produced by pulsed laser deposition

N. Pryds, Bo Toftmann Christensen, Jørgen Bilde-Sørensen, Jørgen Schou, Søren Linderoth

    Research output: Contribution to journalConference articleResearchpeer-review

    Abstract

    Films of yuria-stabilized zirconia (YSZ) on a polished silicon substrate of diameter up to 125 mm have been produced in a large-area pulsed laser deposition (PLD) setup under typical PLD conditions. The film thickness over the full film area has been determined by energy-dispersive Xray spectrometry in a scanning electron microscope (SEM) with use of a method similar to one described by Bishop and Poole. The attenuation of the electron-induced X-rays from the Si wafer by the film was monitored at a number of points along a diameter and the thickness was determined by Monte Carlo simulations of the attenuation for various values of film thickness with the program CASINO. These results have been compared with direct measurements in the SEM of the film thickness on a cross-section on one of the wafers. The results of these measurements demonstrate the ability of this technique to accurately determine the thickness of a large film, i.e. up to diameters of 125 mm, in a relatively short time, without destroying the substrate, without the need of a standard sample and without the need of a flat substrate. We have also demonstrated that by controlling the deposition parameters large-area YSZ films with uniform thickness can be produced. (c) 2005 Elsevier B.V. All rights reserved.
    Original languageEnglish
    JournalApplied Surface Science
    Volume252
    Issue number13
    Pages (from-to)4882-4885
    ISSN0169-4332
    DOIs
    Publication statusPublished - 2006
    EventEuropean Materials Research society 2005 - Symposium-J: Advances in Laser and Lamp Processing of Functional Materials - EMRS 2005 Symposium J - Strasbourg (FR), 31 May - 5 Jun
    Duration: 1 Jan 2005 → …

    Conference

    ConferenceEuropean Materials Research society 2005 - Symposium-J: Advances in Laser and Lamp Processing of Functional Materials - EMRS 2005 Symposium J
    CityStrasbourg (FR), 31 May - 5 Jun
    Period01/01/2005 → …

    Cite this

    @inproceedings{829210cd5ef1409cb822b5568f5e548a,
    title = "Thickness determination of large-area films of yttria-stabilized zirconia produced by pulsed laser deposition",
    abstract = "Films of yuria-stabilized zirconia (YSZ) on a polished silicon substrate of diameter up to 125 mm have been produced in a large-area pulsed laser deposition (PLD) setup under typical PLD conditions. The film thickness over the full film area has been determined by energy-dispersive Xray spectrometry in a scanning electron microscope (SEM) with use of a method similar to one described by Bishop and Poole. The attenuation of the electron-induced X-rays from the Si wafer by the film was monitored at a number of points along a diameter and the thickness was determined by Monte Carlo simulations of the attenuation for various values of film thickness with the program CASINO. These results have been compared with direct measurements in the SEM of the film thickness on a cross-section on one of the wafers. The results of these measurements demonstrate the ability of this technique to accurately determine the thickness of a large film, i.e. up to diameters of 125 mm, in a relatively short time, without destroying the substrate, without the need of a standard sample and without the need of a flat substrate. We have also demonstrated that by controlling the deposition parameters large-area YSZ films with uniform thickness can be produced. (c) 2005 Elsevier B.V. All rights reserved.",
    keywords = "Br{\ae}ndselsceller og brint",
    author = "N. Pryds and Christensen, {Bo Toftmann} and J{\o}rgen Bilde-S{\o}rensen and J{\o}rgen Schou and S{\o}ren Linderoth",
    year = "2006",
    doi = "10.1016/j.apsusc.2005.07.145",
    language = "English",
    volume = "252",
    pages = "4882--4885",
    journal = "Applied Surface Science",
    issn = "0169-4332",
    publisher = "Elsevier",
    number = "13",

    }

    Thickness determination of large-area films of yttria-stabilized zirconia produced by pulsed laser deposition. / Pryds, N.; Christensen, Bo Toftmann; Bilde-Sørensen, Jørgen; Schou, Jørgen; Linderoth, Søren.

    In: Applied Surface Science, Vol. 252, No. 13, 2006, p. 4882-4885.

    Research output: Contribution to journalConference articleResearchpeer-review

    TY - GEN

    T1 - Thickness determination of large-area films of yttria-stabilized zirconia produced by pulsed laser deposition

    AU - Pryds, N.

    AU - Christensen, Bo Toftmann

    AU - Bilde-Sørensen, Jørgen

    AU - Schou, Jørgen

    AU - Linderoth, Søren

    PY - 2006

    Y1 - 2006

    N2 - Films of yuria-stabilized zirconia (YSZ) on a polished silicon substrate of diameter up to 125 mm have been produced in a large-area pulsed laser deposition (PLD) setup under typical PLD conditions. The film thickness over the full film area has been determined by energy-dispersive Xray spectrometry in a scanning electron microscope (SEM) with use of a method similar to one described by Bishop and Poole. The attenuation of the electron-induced X-rays from the Si wafer by the film was monitored at a number of points along a diameter and the thickness was determined by Monte Carlo simulations of the attenuation for various values of film thickness with the program CASINO. These results have been compared with direct measurements in the SEM of the film thickness on a cross-section on one of the wafers. The results of these measurements demonstrate the ability of this technique to accurately determine the thickness of a large film, i.e. up to diameters of 125 mm, in a relatively short time, without destroying the substrate, without the need of a standard sample and without the need of a flat substrate. We have also demonstrated that by controlling the deposition parameters large-area YSZ films with uniform thickness can be produced. (c) 2005 Elsevier B.V. All rights reserved.

    AB - Films of yuria-stabilized zirconia (YSZ) on a polished silicon substrate of diameter up to 125 mm have been produced in a large-area pulsed laser deposition (PLD) setup under typical PLD conditions. The film thickness over the full film area has been determined by energy-dispersive Xray spectrometry in a scanning electron microscope (SEM) with use of a method similar to one described by Bishop and Poole. The attenuation of the electron-induced X-rays from the Si wafer by the film was monitored at a number of points along a diameter and the thickness was determined by Monte Carlo simulations of the attenuation for various values of film thickness with the program CASINO. These results have been compared with direct measurements in the SEM of the film thickness on a cross-section on one of the wafers. The results of these measurements demonstrate the ability of this technique to accurately determine the thickness of a large film, i.e. up to diameters of 125 mm, in a relatively short time, without destroying the substrate, without the need of a standard sample and without the need of a flat substrate. We have also demonstrated that by controlling the deposition parameters large-area YSZ films with uniform thickness can be produced. (c) 2005 Elsevier B.V. All rights reserved.

    KW - Brændselsceller og brint

    U2 - 10.1016/j.apsusc.2005.07.145

    DO - 10.1016/j.apsusc.2005.07.145

    M3 - Conference article

    VL - 252

    SP - 4882

    EP - 4885

    JO - Applied Surface Science

    JF - Applied Surface Science

    SN - 0169-4332

    IS - 13

    ER -