Thermal stability of vapor phase deposited self-assembled monolayers for MEMS anti-stiction

Yanxin Zhuang, Ole Hansen, Thomas Knieling, Christian Wang, Pirmin Rombach, Walter Lang, Wolfgang Benecke, Markus Kehlenbeck, Jörn Koblitz

Research output: Contribution to journalJournal articleResearchpeer-review

Original languageEnglish
JournalJournal of Micromechanics and Microengineering
Volume16
Pages (from-to)2259-2264
ISSN0960-1317
DOIs
Publication statusPublished - 2006

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