Thermal probe measurements in inductively coupled plasmas produced in Ar/O2 and Ar/SF6

Eugen Stamate, T. Murata, H. Sugai

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsResearchpeer-review

Original languageEnglish
Title of host publicationProceedings of International COE Forum on Plasma Science and Technology
Number of pages2
Publication date2004
Pages113-114
Publication statusPublished - 2004
Externally publishedYes
EventInternational COE Forum on Plasma Science and Technology - Nagoya, Japan
Duration: 5 Apr 20047 Apr 2004

Conference

ConferenceInternational COE Forum on Plasma Science and Technology
Country/TerritoryJapan
CityNagoya
Period05/04/200407/04/2004

Cite this