Thermal oxidation assisted chemical mechanical polishing for low-loss 4H-SiC integrated photonic devices

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Original languageEnglish
Publication date2021
Number of pages2
Publication statusPublished - 2021
Event47th Micro and Nano Engineering Conference 2021 - Lingotto, Turin, Italy
Duration: 20 Sep 202123 Sep 2021
https://www.mne2021.org/

Conference

Conference47th Micro and Nano Engineering Conference 2021
LocationLingotto
Country/TerritoryItaly
CityTurin
Period20/09/202123/09/2021
Internet address

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