Thermal Microactuator Characterisation

Jacques Jonsmann, Siebe Bouwstra

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of Design, test and microfabrication of MEMS and MOEMS
Volume	3680
Publisher	SPIE
Publication date	1999
Pages	1046-1055
ISBN (Print)	0819431540
Publication status	Published - 1999
Event	Design, test and microfabrication of MEMS and MOEMS - Paris Duration: 1 Jan 1999 → …

Conference	Design, test and microfabrication of MEMS and MOEMS
City	Paris
Period	01/01/1999 → …

OpenUrl availability

@inproceedings{1bc1141c2a4f4bd88517b6682ae488f0,

title = "Thermal Microactuator Characterisation",

author = "Jacques Jonsmann and Siebe Bouwstra",

year = "1999",

language = "English",

isbn = "0819431540",

volume = "3680",

pages = "1046--1055",

booktitle = "Proceedings of Design, test and microfabrication of MEMS and MOEMS",

publisher = "SPIE",

address = "United States",

note = "Design, test and microfabrication of MEMS and MOEMS ; Conference date: 01-01-1999",

}