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Theory and modeling of thin-film actuation in microscale acoustofluidics
André Gugele Steckel
Biophysics and Fluids
Department of Physics
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Book/Report
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Ph.D. thesis
7
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Dive into the research topics of 'Theory and modeling of thin-film actuation in microscale acoustofluidics'. Together they form a unique fingerprint.
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Engineering
Microscale
100%
Thin Films
100%
Actuation
100%
Piezoelectric
42%
Nitride
42%
Transducer
42%
Hot Spot
21%
Young's Modulus
14%
Travelling Wave
14%
Microelectromechanical System
14%
Poisson Ratio
14%
Clean Rooms
14%
Microfluidic Channel
7%
Good Agreement
7%
Mechanical Part
7%
Fourth Order
7%
Mixers (Machinery)
7%
Acoustic Pressure
7%
Gluing
7%
Quality Factor
7%
Flow Separation
7%
Antinode
7%
Metal Plate
7%
Acoustic Mode
7%
Energy Engineering
7%
Nodes
7%
Titanate
7%
Piezoelectric Material
7%
Standing Wave
7%
Lead Zirconate
7%
Material Science
Thin Films
100%
Piezoelectricity
42%
Scandium
21%
Aluminum Nitride
21%
Nitride Compound
21%
Aluminum
21%
Microelectromechanical System
14%
Young's Modulus
14%
Poisson Ratio
14%
Actuator
7%
Lead Zirconate Titanate
7%
Film
7%
Silicon
7%
Piezoelectric Material
7%
Hazardous Material
7%
Plate Metal
7%
Keyphrases
Aluminum Scandium Nitride (AlScN)
60%
Focus Particles
20%
Thin-film Actuators
20%
Micrometer Precision
20%
Bulk PZT
20%
Continuous Flow Separation
20%
Acoustfluidics
20%
Physics
Blood Plasma
7%