The Measurement of Electron-Induced Erosion of Condensed Gases: Experimental Methods

Jørgen Schou, H. Sørensen, P. Børgesen

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    Two experimental methods for measuring the erosion yield of condensed gases are described. One, the frequency-change method, utilizes a quartz-crystal microbalance operating at liquid-helium temperature. The other, the emissivity-change method is based on the strongly varying electron emission as a function of the condensed-gas film thickness. Satisfactory results have been obtained for both methods for solid Ne and D2 at electron energies up to 3 keV, and the mutual agreement is good as well. Accurate measurements are affected critically by the beam conditions, particularly if the erosion yield depends on the film thickness. The erosion yield has been measured for dominant electron sputtering of solid Ne ( ≈ 28 Ne-atoms/electron) as well as for beam-induced evaporation at 2 keV. In the latter case a clear lateral broadening of the erosion spot is observed.
    Original languageEnglish
    JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
    Issue number1
    Pages (from-to)44-57
    Publication statusPublished - 1984

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