The interface structure of directly bonded Si(001) wafers, studied by X-ray diffraction

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Research

Original language	English
Title of host publication	Programme and abstracts
Number of pages	3
Place of Publication	London
Publisher	Institute of Physics
Publication date	1999
Publication status	Published - 1999
Event	Condensed Matter and Materials Physics Conference 99 - Leicester, United Kingdom Duration: 19 Dec 1999 → 22 Dec 1999

Conference	Condensed Matter and Materials Physics Conference 99
Country/Territory	United Kingdom
City	Leicester
Period	19/12/1999 → 22/12/1999

OpenUrl availability

@inbook{b33b24a1c0164543891c45e52d8a0234,

title = "The interface structure of directly bonded Si(001) wafers, studied by X-ray diffraction",

keywords = "Nye funktionelle materialer",

author = "M. Nielsen and R. Feidenhans'l and P.B. Howes and F. Grey and S. Weichel and J. Vedde",

year = "1999",

language = "English",

booktitle = "Programme and abstracts",

publisher = "Institute of Physics",

address = "United Kingdom",

note = "Condensed Matter and Materials Physics Conference 99, CMMP '99 ; Conference date: 19-12-1999 Through 22-12-1999",

}

TY - ABST

T1 - The interface structure of directly bonded Si(001) wafers, studied by X-ray diffraction

AU - Nielsen, M.

AU - Feidenhans'l, R.

AU - Howes, P.B.

AU - Grey, F.

AU - Weichel, S.

AU - Vedde, J.

PY - 1999

Y1 - 1999

KW - Nye funktionelle materialer

M3 - Conference abstract in proceedings

BT - Programme and abstracts

PB - Institute of Physics

CY - London

T2 - Condensed Matter and Materials Physics Conference 99

Y2 - 19 December 1999 through 22 December 1999

ER -