The Influence of an ASE Etch Process on SU-8 Layer and on the Release Yield of SU-8 Micro-cantilevers

Research output: Contribution to conference › Poster › Research › peer-review

Original language	English
Publication date	2008
Publication status	Published - 2008
Event	International Workshop on Nanomechanical Cantilever Sensors - Mainze, Germany Duration: 19 May 2008 → 21 May 2008

Workshop	International Workshop on Nanomechanical Cantilever Sensors
Country/Territory	Germany
City	Mainze
Period	19/05/2008 → 21/05/2008

OpenUrl availability

@conference{ebfe602d5aa3480784bf2452cc4c0f87,

title = "The Influence of an ASE Etch Process on SU-8 Layer and on the Release Yield of SU-8 Micro-cantilevers",

author = "Nadine-Nicole Noeth and Keller, \{Stephan Urs\} and Anja Boisen",

year = "2008",

language = "English",

note = "International Workshop on Nanomechanical Cantilever Sensors ; Conference date: 19-05-2008 Through 21-05-2008",

}