The Influence of an ASE Etch Process on SU-8 Layer and on the Release Yield of SU-8 Micro-cantilevers

Nadine-Nicole Noeth, Stephan Urs Keller, Anja Boisen

    Research output: Contribution to conferencePosterResearchpeer-review

    Original languageEnglish
    Publication date2008
    Publication statusPublished - 2008
    EventInternational Workshop on Nanomechanical Cantilever Sensors - Mainze, Germany
    Duration: 19 May 200821 May 2008

    Workshop

    WorkshopInternational Workshop on Nanomechanical Cantilever Sensors
    CountryGermany
    CityMainze
    Period19/05/200821/05/2008

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