Original language | English |
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Journal | Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures |
Volume | 18 |
Issue number | 1 |
Pages (from-to) | 69-75 |
ISSN | 1071-1023 |
Publication status | Published - 2000 |
Externally published | Yes |
The frictional properties of titanium carbide, titanium nitride and vanadium carbide: Measurement of a compositional dependence with atomic force microscopy
Seunghwan Lee, Oussama El-bjeirami, Scott S. Perry, Stephen V. Diziulius, Peter Franz, Gouri Radhakrishnan
Research output: Contribution to journal › Journal article › Research › peer-review