The frictional properties of titanium carbide, titanium nitride and vanadium carbide: Measurement of a compositional dependence with atomic force microscopy

Seunghwan Lee, Oussama El-bjeirami, Scott S. Perry, Stephen V. Diziulius, Peter Franz, Gouri Radhakrishnan

Research output: Contribution to journalJournal articleResearchpeer-review

Original languageEnglish
JournalJournal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures
Issue number1
Pages (from-to)69-75
Publication statusPublished - 2000
Externally publishedYes

Cite this