The fracture strength of nitrogen doped silicon wafers

Jan Vedde, P. Gravesen

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalMaterials Science and Engineering: B
    Volume36
    Pages (from-to)246-250
    ISSN0921-5107
    Publication statusPublished - 1996

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