The Erosion of Frozen Argon by Swift Helium Ions

F. Besenbacher, Jørgen Bøttiger, O. Graversen, Jens Leonhart Hansen, H. Sørensen

    Research output: Contribution to journalJournal articleResearchpeer-review

    Abstract

    The temperature, energy, and thickness dependence of the erosion rates of frozen argon films when irradiated with 0.1–3 MeV helium ions have been measured. The erosion yields Y are much too high to be explained by the concentional collisional cascade-sputtering theory and are furthermore unequivocally associated with electronic processes generated by the bombarding particle. In the present energy region, it is found that Y scales approximately as the electronic stopping power squared, depends on the charge state of the incoming helium ions, and perhaps more important, is independent of the substrate temperature and current density up to a temperature at which beam-induced thermal sublimation sets in. Different models such as, e.g., Coulomb explosion and ionization spikes, which may explain the experimental results, are discussed.
    Original languageEnglish
    JournalNuclear Instruments and Methods
    Volume191
    Issue number1-3
    Pages (from-to)221-234
    ISSN0029-554X
    DOIs
    Publication statusPublished - 1981

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