Abstract
The sputtering efficiency (i.e. ratio between sputtered energy and impinging ion energy) has been measured for 30–75‐keV lead ions impinging on polycrystalline lead. The results are in good agreement with recent theoretical estimates.
© 1968 The American Institute of Physics
Original language | English |
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Journal | Applied Physics Letters |
Volume | 13 |
Pages (from-to) | 85-86 |
ISSN | 0003-6951 |
DOIs | |
Publication status | Published - 1968 |