| Original language | English |
|---|---|
| Title of host publication | Proceedings of the International Conference on Surface Metrology |
| Number of pages | 5 |
| Publication date | 2009 |
| Publication status | Published - 2009 |
| Externally published | Yes |
| Event | International Conference on Surface Metrology - Worcester Polytechnic Institute, Worcester, MA, United States Duration: 26 Oct 2009 → 28 Oct 2009 |
Conference
| Conference | International Conference on Surface Metrology |
|---|---|
| Location | Worcester Polytechnic Institute |
| Country/Territory | United States |
| City | Worcester, MA |
| Period | 26/10/2009 → 28/10/2009 |
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