Original language | English |
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Title of host publication | Proceedings of the International Conference on Surface Metrology |
Number of pages | 5 |
Publication date | 2009 |
Publication status | Published - 2009 |
Externally published | Yes |
Event | International Conference on Surface Metrology - Worcester Polytechnic Institute, Worcester, MA, United States Duration: 26 Oct 2009 → 28 Oct 2009 |
Conference
Conference | International Conference on Surface Metrology |
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Location | Worcester Polytechnic Institute |
Country/Territory | United States |
City | Worcester, MA |
Period | 26/10/2009 → 28/10/2009 |