The effect of nitrogen incorporation in boron carbide and iridium thin films

S. Massahi; F. E. Christensen; D. D.M. Ferreira; P. Dalampiras; S. Svendsen; A. Jafari

doi:10.1117/12.2311622

The effect of nitrogen incorporation in boron carbide and iridium thin films

S. Massahi^*, F. E. Christensen, D. D.M. Ferreira, P. Dalampiras, S. Svendsen, A. Jafari

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

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Abstract

Thin film coated mirrors enable pioneering observations of X-rays and soft gamma rays. The performance of the reflective mirrors is key in expanding knowledge of the hot and energetic Universe. A critical part of maturing the optics technology is firstly, to establish a smooth surface and interface of the selected materials and, secondly, to obtain an in-depth understanding of the contamination in the thin films and ultimately, to ensure long-term stability. The aim of this study is to investigate the chemical composition, roughness and stability of boron carbide and iridium thin films and the effects of nitrogen incorporation.

Original language	English
Title of host publication	Space Telescopes and Instrumentation 2018: Ultraviolet to Gamma Ray
Editors	Jan-Willem A. den Herder, Shouleh Nikzad, Kazuhiro Nakazawa
Number of pages	11
Volume	10699
Publisher	SPIE - International Society for Optical Engineering
Publication date	2018
Article number	106993Y
ISBN (Print)	9781510619517
DOIs	https://doi.org/10.1117/12.2311622
Publication status	Published - 2018
Event	SPIE Astronomical Telescopes + Instrumentation 2018 - Austin, United States Duration: 10 Jun 2018 → 15 Jun 2018

Conference

Conference	SPIE Astronomical Telescopes + Instrumentation 2018
Country/Territory	United States
City	Austin
Period	10/06/2018 → 15/06/2018
Sponsor	4D Technology Corporation, Andor Technology, Ltd., Astronomical Consultants and Equipment, Inc., Giant Magellan Telescope, SPIE

Keywords

Athena
DC Magnetron Sputtering
Multilayer Deposition
Reactive sputtering
Silicon Pore Optics (SPO)
X-ray Optics
XPS
XRR

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Massahi, S., Christensen, F. E., Ferreira, D. D. M., Dalampiras, P., Svendsen, S., & Jafari, A. (2018). The effect of nitrogen incorporation in boron carbide and iridium thin films. In J.-W. A. den Herder, S. Nikzad, & K. Nakazawa (Eds.), Space Telescopes and Instrumentation 2018: Ultraviolet to Gamma Ray (Vol. 10699). Article 106993Y SPIE - International Society for Optical Engineering. https://doi.org/10.1117/12.2311622

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title = "The effect of nitrogen incorporation in boron carbide and iridium thin films",

abstract = "Thin film coated mirrors enable pioneering observations of X-rays and soft gamma rays. The performance of the reflective mirrors is key in expanding knowledge of the hot and energetic Universe. A critical part of maturing the optics technology is firstly, to establish a smooth surface and interface of the selected materials and, secondly, to obtain an in-depth understanding of the contamination in the thin films and ultimately, to ensure long-term stability. The aim of this study is to investigate the chemical composition, roughness and stability of boron carbide and iridium thin films and the effects of nitrogen incorporation.",

keywords = "Athena, DC Magnetron Sputtering, Multilayer Deposition, Reactive sputtering, Silicon Pore Optics (SPO), X-ray Optics, XPS, XRR",

author = "S. Massahi and Christensen, {F. E.} and Ferreira, {D. D.M.} and P. Dalampiras and S. Svendsen and A. Jafari",

year = "2018",

doi = "10.1117/12.2311622",

language = "English",

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volume = "10699",

editor = "{den Herder}, {Jan-Willem A. } and Nikzad, {Shouleh } and Nakazawa, {Kazuhiro }",

booktitle = "Space Telescopes and Instrumentation 2018: Ultraviolet to Gamma Ray",

publisher = "SPIE - International Society for Optical Engineering",

note = "SPIE Astronomical Telescopes + Instrumentation 2018 ; Conference date: 10-06-2018 Through 15-06-2018",

}

Massahi, S , Christensen, FE , Ferreira, DDM, Dalampiras, P, Svendsen, S & Jafari, A 2018, The effect of nitrogen incorporation in boron carbide and iridium thin films. in J-WA den Herder, S Nikzad & K Nakazawa (eds), Space Telescopes and Instrumentation 2018: Ultraviolet to Gamma Ray. vol. 10699, 106993Y, SPIE - International Society for Optical Engineering, SPIE Astronomical Telescopes + Instrumentation 2018, Austin, Texas, United States, 10/06/2018. https://doi.org/10.1117/12.2311622

The effect of nitrogen incorporation in boron carbide and iridium thin films. / Massahi, S.; Christensen, F. E.; Ferreira, D. D.M. et al.
Space Telescopes and Instrumentation 2018: Ultraviolet to Gamma Ray. ed. / Jan-Willem A. den Herder; Shouleh Nikzad; Kazuhiro Nakazawa. Vol. 10699 SPIE - International Society for Optical Engineering, 2018. 106993Y.

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

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AU - Svendsen, S.

AU - Jafari, A.

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AB - Thin film coated mirrors enable pioneering observations of X-rays and soft gamma rays. The performance of the reflective mirrors is key in expanding knowledge of the hot and energetic Universe. A critical part of maturing the optics technology is firstly, to establish a smooth surface and interface of the selected materials and, secondly, to obtain an in-depth understanding of the contamination in the thin films and ultimately, to ensure long-term stability. The aim of this study is to investigate the chemical composition, roughness and stability of boron carbide and iridium thin films and the effects of nitrogen incorporation.

KW - Athena

KW - DC Magnetron Sputtering

KW - Multilayer Deposition

KW - Reactive sputtering

KW - Silicon Pore Optics (SPO)

KW - X-ray Optics

KW - XPS

KW - XRR

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DO - 10.1117/12.2311622

M3 - Article in proceedings

AN - SCOPUS:85051870963

SN - 9781510619517

VL - 10699

BT - Space Telescopes and Instrumentation 2018: Ultraviolet to Gamma Ray

A2 - den Herder, Jan-Willem A.

A2 - Nikzad, Shouleh

A2 - Nakazawa, Kazuhiro

PB - SPIE - International Society for Optical Engineering

T2 - SPIE Astronomical Telescopes + Instrumentation 2018

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ER -

Massahi S , Christensen FE , Ferreira DDM, Dalampiras P, Svendsen S, Jafari A. The effect of nitrogen incorporation in boron carbide and iridium thin films. In den Herder JWA, Nikzad S, Nakazawa K, editors, Space Telescopes and Instrumentation 2018: Ultraviolet to Gamma Ray. Vol. 10699. SPIE - International Society for Optical Engineering. 2018. 106993Y doi: 10.1117/12.2311622

The effect of nitrogen incorporation in boron carbide and iridium thin films

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Keywords

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