@inproceedings{dba3afabdbae4feaaa570031010c1e00,
title = "The effect of deposition process parameters on thin film coatings for the Athena X-ray optics",
abstract = "The thin film coating technology for the European Space Agency mission, Advanced Telescope for High-Energy Astrophysics (Athena) has been established. The X-ray optics of the Athena telescope is based on Silicon Pore Optics (SPO) technology which is enhanced by the thin film coatings deposited on the reflective surface of the SPO plates. In this work, we present a literature study of the coating process parameter space and provide an overview of the thin film properties with a focus on micro roughness, chemical composition and wear resistance when deposited under various process conditions. We determined, that the thin film density depends strongly on the mobility of the adatoms on the substrate surface. Some coating process parameters, which have a significant impact on the adatom mobility are the discharge voltage, the working gas pressure and the substrate temperature.",
keywords = "Athena, DC magnetron sputtering, Silicon pore optics, X-ray optics",
author = "S. Massahi and Ferreira, {D. D. M.} and Christensen, {F. E.} and N. Gellert and S. Svendsen and Henriksen, {P. L.} and A. S'jegers and M. Collon and B. Landgraf and D. Girou and A. Thete and B. Shortt and I. Ferreira and M. Bavdaz and W. Sch{\"o}nberger and A. Langer",
note = "Publisher Copyright: {\textcopyright} 2021 SPIE.",
year = "2021",
doi = "10.1117/12.2594422",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE - International Society for Optical Engineering",
editor = "O'Dell, {Stephen L.} and Gaskin, {Jessica A.} and Giovanni Pareschi",
booktitle = "Proceedings of SPIE",
}