The effect of biaxial strain on impurity diffusion in Si and SiGe

A. N. Larsen, N. Zangenberg, Jacob Fage-Pedersen

Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

Original languageEnglish
Publication date2005
Publication statusPublished - 2005
EventEuropean Materials Research Society (E-MRS) Spring Meeting - Strasbourg, France
Duration: 1 Jan 2005 → …

Conference

ConferenceEuropean Materials Research Society (E-MRS) Spring Meeting
CityStrasbourg, France
Period01/01/2005 → …

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