The effect of biaxial strain on impurity diffusion in Si and SiGe

A. N. Larsen, N. Zangenberg, Jacob Fage-Pedersen

    Research output: Contribution to conference › Conference abstract for conference › Research › peer-review

    Original languageEnglish
    Publication date2005
    Publication statusPublished - 2005
    EventEuropean Materials Research Society (E-MRS) Spring Meeting - Strasbourg, France
    Duration: 1 Jan 2005 → …

    Conference

    ConferenceEuropean Materials Research Society (E-MRS) Spring Meeting
    CityStrasbourg, France
    Period01/01/2005 → …

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