The effect of biaxial strain on impurity diffusion in Si and SiGe

A. N. Larsen, N. Zangenberg, Jacob Fage-Pedersen

Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

Original languageEnglish
Publication date2005
Publication statusPublished - 2005
EventEuropean Materials Research Society (E-MRS) Spring Meeting - Strasbourg, France
Duration: 1 Jan 2005 → …

Conference

ConferenceEuropean Materials Research Society (E-MRS) Spring Meeting
CityStrasbourg, France
Period01/01/2005 → …

Cite this

Larsen, A. N., Zangenberg, N., & Fage-Pedersen, J. (2005). The effect of biaxial strain on impurity diffusion in Si and SiGe. Abstract from European Materials Research Society (E-MRS) Spring Meeting, Strasbourg, France, .