Keyphrases
Crystalline Silicon
100%
Nanoislands
100%
Silicon Rich Oxide
75%
Substrate Surface
50%
High Density
50%
Nanosize
50%
Island Formation
50%
C-Si
50%
Si Concentration
50%
Annealing
25%
Surface Treatment
25%
Concentration Gradient
25%
Low Pressure Chemical Vapor Deposition (LPCVD)
25%
Scanning Electron Microscopy
25%
Si Substrate
25%
Nanocrystals
25%
Oxide Precursor
25%
Oxide Film
25%
High-resolution Transmission Electron Microscopy (HRTEM)
25%
Rapid Thermal Annealing
25%
Oxide Interfaces
25%
Si Structures
25%
Integrated Circuit Technology
25%
SiO2 Matrix
25%
Si Islands
25%
Pre-deposition
25%
Excess Si
25%
Engineering
Substrate Surface
100%
Crystalline Silicon
100%
Concentration Gradient
50%
Integrated Circuit
50%
Oxide Film
50%
Si Substrate
50%
Transmissions
50%
Silicon (Si)
50%
High Resolution
50%
Chemical Vapor Deposition
50%
Vapor Deposition
50%
Nanocrystal
50%
Material Science
Crystalline Material
100%
Silicon
100%
Annealing
40%
Density
40%
Scanning Electron Microscopy
20%
Nanocrystalline Material
20%
Electronic Circuit
20%
Film
20%
High-Resolution Transmission Electron Microscopy
20%
Low Pressure Chemical Vapor Deposition
20%
Oxide Interface
20%
Oxide Compound
20%
Oxide Film
20%