The deposition and control of self assembled silicon nano islands on crystalline silicon

Engineering

• Chemical Vapor Deposition 50%
• Concentration Gradient 50%
• Crystalline Silicon 100%
• High Resolution 50%
• Integrated Circuit 50%
• Nanocrystal 50%
• Oxide Film 50%
• Si Substrate 50%
• Silicon (Si) 50%
• Substrate Surface 100%
• Transmissions 50%
• Vapor Deposition 50%

Material Science

• Annealing 40%
• Crystalline Material 100%
• Density 40%
• Electronic Circuit 20%
• Film 20%
• High-Resolution Transmission Electron Microscopy 20%
• Low Pressure Chemical Vapor Deposition 20%
• Nanocrystalline Material 20%
• Oxide Compound 20%
• Oxide Film 20%
• Oxide Interface 20%
• Scanning Electron Microscopy 20%
• Silicon 100%

Keyphrases

• Excess Si 25%
• Pre-deposition 25%
• Si Concentration 50%
• Si Islands 25%
• Silicon Rich Oxide 75%