Temperature and pressure dependence of resonance in multi-layer microcantilevers

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Journal of Micromechanics and Microengineering
Volume	15
Issue number	8
Pages (from-to)	1454–1458
ISSN	0960-1317
Publication status	Published - 2005

OpenUrl availability

@article{7c78c96fe8b548928e78cc87a085e595,

title = "Temperature and pressure dependence of resonance in multi-layer microcantilevers",

author = "Sandberg, {Rasmus Kousholt} and Svendsen, {Winnie Edith} and Kristian M{\o}lhave and Anja Boisen",

year = "2005",

language = "English",

volume = "15",

pages = "1454–1458",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing",

number = "8",

}

TY - JOUR

T1 - Temperature and pressure dependence of resonance in multi-layer microcantilevers

AU - Sandberg, Rasmus Kousholt

AU - Svendsen, Winnie Edith

AU - Mølhave, Kristian

AU - Boisen, Anja

PY - 2005

Y1 - 2005

M3 - Journal article

SN - 0960-1317

VL - 15

SP - 1454

EP - 1458

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 8

ER -