Technology for Fabrication of Nanostructures by Standard Cleanroom Processing and Nanoimprint Lithography

Brian Bilenberg Olsen, S. Jacobsen, C. Pastore, Theodor Nielsen, S: R. Enghoff, C. Jeppesen, A.V. Larsen, Anders Kristensen

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalJapanese Journal of Applied Physics
    Pages (from-to)5606-5608
    Publication statusPublished - 2005

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