Technology for Fabrication of Nanostructures by Standard Cleanroom Processing and Nanoimprint Lithography

Brian Bilenberg Olsen; S. Jacobsen; C. Pastore; Theodor Nielsen; S: R. Enghoff; C. Jeppesen; A.V. Larsen; Anders Kristensen

Technology for Fabrication of Nanostructures by Standard Cleanroom Processing and Nanoimprint Lithography

Brian Bilenberg Olsen, S. Jacobsen, C. Pastore, Theodor Nielsen, S: R. Enghoff, C. Jeppesen, A.V. Larsen, Anders Kristensen

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Japanese Journal of Applied Physics
Volume	44
Pages (from-to)	5606-5608
ISSN	0021-4922
Publication status	Published - 2005

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@article{83ee9f3fce914c7e9e80df4c52f5144d,

title = "Technology for Fabrication of Nanostructures by Standard Cleanroom Processing and Nanoimprint Lithography",

author = "Olsen, {Brian Bilenberg} and S. Jacobsen and C. Pastore and Theodor Nielsen and Enghoff, {S: R.} and C. Jeppesen and A.V. Larsen and Anders Kristensen",

year = "2005",

language = "English",

volume = "44",

pages = "5606--5608",

journal = "Japanese Journal of Applied Physics",

issn = "0021-4922",

publisher = "IOP Publishing",

}

TY - JOUR

T1 - Technology for Fabrication of Nanostructures by Standard Cleanroom Processing and Nanoimprint Lithography

AU - Olsen, Brian Bilenberg

AU - Jacobsen, S.

AU - Pastore, C.

AU - Nielsen, Theodor

AU - Enghoff, S: R.

AU - Jeppesen, C.

AU - Larsen, A.V.

AU - Kristensen, Anders

PY - 2005

Y1 - 2005

M3 - Journal article

SN - 0021-4922

VL - 44

SP - 5606

EP - 5608

JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

ER -