Abstract
Acoustic microscopy is a widely used Non Destructive Testing (NDT) method for micro-inspection. Introductions to ultrasonic NDT in general and acoustic microscopy is given in [1]–[5] and [6]–[9] respectively.
Original language | English |
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Title of host publication | MEMS/NEMS : Manufacturing Methods. |
Editors | Cornelius T. Leondes |
Volume | 3 |
Publication date | 2006 |
Pages | 293-309 |
Chapter | 7 |
ISBN (Print) | 978-0-387-24520-1 |
DOIs | |
Publication status | Published - 2006 |
Externally published | Yes |