Techniques in Scanning Acoustic Microscopy for Enhanced Failure and Material Analysis of Microsystems

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Abstract

Acoustic microscopy is a widely used Non Destructive Testing (NDT) method for micro-inspection. Introductions to ultrasonic NDT in general and acoustic microscopy is given in [1]–[5] and [6]–[9] respectively.
Original languageEnglish
Title of host publicationMEMS/NEMS : Manufacturing Methods.
EditorsCornelius T. Leondes
Volume3
Publication date2006
Pages293-309
Chapter7
ISBN (Print)978-0-387-24520-1
DOIs
Publication statusPublished - 2006
Externally publishedYes

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