Tantalum oxide thin films as protective coatings for sensors

Carsten Christensen, Roger De Reus, Siebe Bouwstra

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Tantalum oxide thin films as protective coatings for sensors
Publication date	1999
Pages	248-251
Publication status	Published - 1999
Event	9th European Workshop on Micromechanics - Ulvik, Norway Duration: 3 Jun 1998 → 5 Jun 1998

Workshop	9th European Workshop on Micromechanics
Country/Territory	Norway
City	Ulvik
Period	03/06/1998 → 05/06/1998

OpenUrl availability

@inproceedings{2e835e0ddf964255ad0dc3e850a32833,

title = "Tantalum oxide thin films as protective coatings for sensors",

author = "Carsten Christensen and Reus, \{Roger De\} and Siebe Bouwstra",

year = "1999",

language = "English",

pages = "248--251",

booktitle = "Tantalum oxide thin films as protective coatings for sensors",

note = "9th European Workshop on Micromechanics, MME '98 ; Conference date: 03-06-1998 Through 05-06-1998",

}