Tantalum oxide films as protective coatings for sensors

Carsten Christensen, Roger De Reus, Siebe Bouwstra

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Journal of Micromechanics and Microengineering
Volume	9
Issue number	2
Pages (from-to)	113-18
ISSN	0960-1317
Publication status	Published - 1999

OpenUrl availability

@article{40fe3934451946dc97035b045f7a6151,

title = "Tantalum oxide films as protective coatings for sensors",

author = "Carsten Christensen and Reus, {Roger De} and Siebe Bouwstra",

year = "1999",

language = "English",

volume = "9",

pages = "113--18",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing",

number = "2",

}