Tantalum coating of steel, copper, aluminium, and titanium by thermal chemical vapor deposition (CVD)

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearch

Original languageEnglish
Title of host publicationProceeding of the symposium on fundamental gas-phase and surface chemistry of vapor-phase materials synthesis
PublisherThe Electrochemical Society
Publication date1999
Pages432-436
Publication statusPublished - 1999
EventSymposium on fundamental gas-phase and surface chemistry of vapor-phase materials synthesis - Boston
Duration: 1 Jan 1998 → …

Conference

ConferenceSymposium on fundamental gas-phase and surface chemistry of vapor-phase materials synthesis
CityBoston
Period01/01/1998 → …

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