Abstract
We demonstrate systematic control of mechanical nonlinearities in micro-electromechanical (MEMS) resonators using shape optimization methods. This approach generates beams with non-uniform profiles, which have nonlinearities and frequencies that differ from uniform beams. A set of bridge-type microbeams with selected variable profiles that directly affect the nonlinear characteristics of in-plane vibrations was designed and characterized. Experimental results have demonstrated that these shape changes result in more than a three-fold increase and a two-fold reduction in the Duffing nonlinearity due to resonator mid-line stretching. The manipulation of this nonlinearity has significant interest in many applications, including precise mass sensing, accurate measurement of angular rates, and timekeeping. Published by AIP Publishing.
Original language | English |
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Article number | 081902 |
Journal | Applied Physics Letters |
Volume | 110 |
Issue number | 8 |
Number of pages | 5 |
ISSN | 0003-6951 |
DOIs | |
Publication status | Published - 2017 |