Abstract
We have developed an efficient shape optimization procedure for tailoring the nonlinear dynamic performance of microbeam resonators with electrostatic excitation. By relatively simple modifications of the cross-sectional dimensions along the length of the beam we demonstrate a considerable degree of control over the characteristic cubic nonlinear coefficient, allowing e.g. for extending the linear range of operation for resonant MEMS devices, which is important for improving signal-to-noise and other performance metrics.
Original language | English |
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Publication date | 2016 |
Number of pages | 2 |
Publication status | Published - 2016 |
Event | 24th International Congress of Theoretical and Applied Mechanics - Montreal, Canada Duration: 21 Aug 2016 → 26 Aug 2016 |
Conference
Conference | 24th International Congress of Theoretical and Applied Mechanics |
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Country/Territory | Canada |
City | Montreal |
Period | 21/08/2016 → 26/08/2016 |