We have developed an efficient shape optimization procedure for tailoring the nonlinear dynamic performance of microbeam resonators with electrostatic excitation. By relatively simple modifications of the cross-sectional dimensions along the length of the beam we demonstrate a considerable degree of control over the characteristic cubic nonlinear coefficient, allowing e.g. for extending the linear range of operation for resonant MEMS devices, which is important for improving signal-to-noise and other performance metrics.
|Number of pages||2|
|Publication status||Published - 2016|
|Event||24th International Congress of Theoretical and Applied Mechanics - Montreal, Canada|
Duration: 21 Aug 2016 → 26 Aug 2016
|Conference||24th International Congress of Theoretical and Applied Mechanics|
|Period||21/08/2016 → 26/08/2016|