Tailoring nonlinear dynamics of microbeam resonators with electrostatic actuation

Jakob Søndergaard Jensen, Suguang Dou, Steven W. Shaw

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    Abstract

    We have developed an efficient shape optimization procedure for tailoring the nonlinear dynamic performance of microbeam resonators with electrostatic excitation. By relatively simple modifications of the cross-sectional dimensions along the length of the beam we demonstrate a considerable degree of control over the characteristic cubic nonlinear coefficient, allowing e.g. for extending the linear range of operation for resonant MEMS devices, which is important for improving signal-to-noise and other performance metrics.
    Original languageEnglish
    Publication date2016
    Number of pages2
    Publication statusPublished - 2016
    Event24th International Congress of Theoretical and Applied Mechanics - Montreal, Canada
    Duration: 21 Aug 201626 Aug 2016

    Conference

    Conference24th International Congress of Theoretical and Applied Mechanics
    Country/TerritoryCanada
    CityMontreal
    Period21/08/201626/08/2016

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