Tailoring a nanometer-scale fabrication process for silicon photonics

Marcus Albrechtsen, Ali Nawaz Babar, Babak Vosoughi Lahijani, Evgeniy Shkondin, Guillermo Arregui Bravo, Jesper Sand, Henri Jansen, Søren Stobbe

Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

130 Downloads (Pure)
Original languageEnglish
Publication date2022
Number of pages1
Publication statusPublished - 2022
Event48th International Conference on Micro and Nano Engineering - Gasthuisberg, Leuven, Belgium
Duration: 19 Sept 202223 Sept 2022
Conference number: 48

Conference

Conference48th International Conference on Micro and Nano Engineering
Number48
LocationGasthuisberg
Country/TerritoryBelgium
CityLeuven
Period19/09/202223/09/2022

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