Tailoring a nanometer-scale fabrication process for silicon photonics

Marcus Albrechtsen; Ali Nawaz Babar; Babak Vosoughi Lahijani; Evgeniy Shkondin; Guillermo Arregui Bravo; Jesper Sand; Henri Jansen; Søren Stobbe

Tailoring a nanometer-scale fabrication process for silicon photonics

Marcus Albrechtsen, Ali Nawaz Babar, Babak Vosoughi Lahijani, Evgeniy Shkondin, Guillermo Arregui Bravo, Jesper Sand, Henri Jansen, Søren Stobbe

Technical University of Denmark

Research output: Contribution to conference › Conference abstract for conference › Research › peer-review

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Original language	English
Publication date	2022
Number of pages	1
Publication status	Published - 2022
Event	48^th International Conference on Micro and Nano Engineering - Gasthuisberg, Leuven, Belgium Duration: 19 Sept 2022 → 23 Sept 2022 Conference number: 48

Conference

Conference	48^th International Conference on Micro and Nano Engineering
Number	48
Location	Gasthuisberg
Country/Territory	Belgium
City	Leuven
Period	19/09/2022 → 23/09/2022

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@conference{89ced061a5574eb186745e3db33e4ad2,

title = "Tailoring a nanometer-scale fabrication process for silicon photonics",

author = "Marcus Albrechtsen and Babar, {Ali Nawaz} and Lahijani, {Babak Vosoughi} and Evgeniy Shkondin and Bravo, {Guillermo Arregui} and Jesper Sand and Henri Jansen and S{\o}ren Stobbe",

year = "2022",

language = "English",

note = "48<sup>th</sup> International Conference on Micro and Nano Engineering, MNE 2022 ; Conference date: 19-09-2022 Through 23-09-2022",

}

TY - ABST

T1 - Tailoring a nanometer-scale fabrication process for silicon photonics

AU - Albrechtsen, Marcus

AU - Babar, Ali Nawaz

AU - Lahijani, Babak Vosoughi

AU - Shkondin, Evgeniy

AU - Bravo, Guillermo Arregui

AU - Sand, Jesper

AU - Jansen, Henri

AU - Stobbe, Søren

N1 - Conference code: 48

PY - 2022

Y1 - 2022

M3 - Conference abstract for conference

T2 - 48<sup>th</sup> International Conference on Micro and Nano Engineering

Y2 - 19 September 2022 through 23 September 2022

ER -