Systematic design of high-Q prestressed micro membrane resonators

Wenjun  Gao; Fengwen Wang; Ole Sigmund

doi:10.1016/j.cma.2019.112692

Systematic design of high-Q prestressed micro membrane resonators

Wenjun Gao^*, Fengwen Wang, Ole Sigmund

^*Corresponding author for this work

Tongji University

Research output: Contribution to journal › Journal article › Research › peer-review

189 Downloads (Pure)

Abstract

Quality factor (Q) and frequency-quality factor (Qf) of prestressed membrane resonators are enhanced by topology optimization. The optimization targets the fundamental mode which is more easily identified in physical experiments compared to high-order modes embedded in possibly dense frequency ranges. Both intrinsic and extrinsic losses are considered in the optimization process. With different combinations of the two damping sources, topology optimization yields distinct designs, which reveals that damping mechanisms significantly affect the optimal geometry of micro resonators. For optimized designs, the Qf in the fundamental mode exceeds the minimum requirement for room-temperature quantum optomechanics (6.2×10¹² Hz) and reaches 10¹³ Hz in numerical experiments.

Original language	English
Article number	112692
Journal	Computer Methods in Applied Mechanics and Engineering
Volume	361
ISSN	0045-7825
DOIs	https://doi.org/10.1016/j.cma.2019.112692
Publication status	Published - 2020

Keywords

Topology optimization
Prestressed membranes
Resonators
Quality factor
Frequency-quality factor

Access to Document

10.1016/j.cma.2019.112692

FulltextAccepted author manuscript, 7.61 MB

OpenUrl availability

Full text

InnoTop: InnoTop, Interactive, Non-Linear, High-Resolution Topology Optimization
Sigmund, O. (Project Coordinator), Petersen, M. L. (Project Manager), Carlberg, L. K. (Project Manager), Aage, N. (Project Participant), Andreasen, C. S. (Project Participant), Wang, F. (Project Participant), Bærentzen, J. A. (Project Participant) & Assentoft, D. (Project Manager)
01/09/2017 → 31/08/2024
Project: Research

Cite this

@article{8c5db099baf040aaa817853597c4e759,

title = "Systematic design of high-Q prestressed micro membrane resonators",

abstract = "Quality factor (Q) and frequency-quality factor (Qf) of prestressed membrane resonators are enhanced by topology optimization. The optimization targets the fundamental mode which is more easily identified in physical experiments compared to high-order modes embedded in possibly dense frequency ranges. Both intrinsic and extrinsic losses are considered in the optimization process. With different combinations of the two damping sources, topology optimization yields distinct designs, which reveals that damping mechanisms significantly affect the optimal geometry of micro resonators. For optimized designs, the Qf in the fundamental mode exceeds the minimum requirement for room-temperature quantum optomechanics (6.2×1012 Hz) and reaches 1013 Hz in numerical experiments.",

keywords = "Topology optimization, Prestressed membranes, Resonators, Quality factor, Frequency-quality factor",

author = "Wenjun Gao and Fengwen Wang and Ole Sigmund",

year = "2020",

doi = "10.1016/j.cma.2019.112692",

language = "English",

volume = "361",

journal = "Computer Methods in Applied Mechanics and Engineering",

issn = "0045-7825",

publisher = "Elsevier",

}

TY - JOUR

T1 - Systematic design of high-Q prestressed micro membrane resonators

AU - Gao, Wenjun

AU - Wang, Fengwen

AU - Sigmund, Ole

PY - 2020

Y1 - 2020

N2 - Quality factor (Q) and frequency-quality factor (Qf) of prestressed membrane resonators are enhanced by topology optimization. The optimization targets the fundamental mode which is more easily identified in physical experiments compared to high-order modes embedded in possibly dense frequency ranges. Both intrinsic and extrinsic losses are considered in the optimization process. With different combinations of the two damping sources, topology optimization yields distinct designs, which reveals that damping mechanisms significantly affect the optimal geometry of micro resonators. For optimized designs, the Qf in the fundamental mode exceeds the minimum requirement for room-temperature quantum optomechanics (6.2×1012 Hz) and reaches 1013 Hz in numerical experiments.

AB - Quality factor (Q) and frequency-quality factor (Qf) of prestressed membrane resonators are enhanced by topology optimization. The optimization targets the fundamental mode which is more easily identified in physical experiments compared to high-order modes embedded in possibly dense frequency ranges. Both intrinsic and extrinsic losses are considered in the optimization process. With different combinations of the two damping sources, topology optimization yields distinct designs, which reveals that damping mechanisms significantly affect the optimal geometry of micro resonators. For optimized designs, the Qf in the fundamental mode exceeds the minimum requirement for room-temperature quantum optomechanics (6.2×1012 Hz) and reaches 1013 Hz in numerical experiments.

KW - Topology optimization

KW - Prestressed membranes

KW - Resonators

KW - Quality factor

KW - Frequency-quality factor

U2 - 10.1016/j.cma.2019.112692

DO - 10.1016/j.cma.2019.112692

M3 - Journal article

SN - 0045-7825

VL - 361

JO - Computer Methods in Applied Mechanics and Engineering

JF - Computer Methods in Applied Mechanics and Engineering

M1 - 112692

ER -

Systematic design of high-Q prestressed micro membrane resonators

Abstract

Keywords

Access to Document

OpenUrl availability

Fingerprint

Projects

InnoTop: InnoTop, Interactive, Non-Linear, High-Resolution Topology Optimization

Cite this