Systematic design and optimization of multi-material, multi-degree-of-freedom micro actuators

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of Modelling and Simulation of Microsystems, Semiconductors, Sensors and Actuators, MSM2000
    Place of PublicationSan Diego, CA
    Publication date2000
    Pages36-99
    Publication statusPublished - 2000

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