Original language | English |
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Title of host publication | Proceedings of Modelling and Simulation of Microsystems, Semiconductors, Sensors and Actuators, MSM2000 |
Place of Publication | San Diego, CA |
Publication date | 2000 |
Pages | 36-99 |
Publication status | Published - 2000 |
Systematic design and optimization of multi-material, multi-degree-of-freedom micro actuators
Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review