System on chip mass sensor based on polysilicon cantilevers arrays for multiple detection

M. Villarroya, J. Verd, J. Teva, G. Abadal, Esko Sebastian Forsén, F. Perez-Murano, A. Uranga, E. Figueras, J. Montserrat, J. Esteve, Anja Boisen, N. Barniol

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalSensors and Actuators A: Physical
    Volume132
    Issue number1
    Pages (from-to)154-164
    ISSN0924-4247
    Publication statusPublished - 2006

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