Original language | English |
---|---|
Journal | Sensors and Actuators A: Physical |
Volume | 132 |
Issue number | 1 |
Pages (from-to) | 154-164 |
ISSN | 0924-4247 |
Publication status | Published - 2006 |
System on chip mass sensor based on polysilicon cantilevers arrays for multiple detection
M. Villarroya, J. Verd, J. Teva, G. Abadal, Esko Sebastian Forsén, F. Perez-Murano, A. Uranga, E. Figueras, J. Montserrat, J. Esteve, Anja Boisen, N. Barniol
Research output: Contribution to journal › Journal article › Research › peer-review