System on chip mass sensor based on polysilicon cantilevers arrays for multiple detection

M. Villarroya; J. Verd; J. Teva; G. Abadal; Esko Sebastian Forsén; F. Perez-Murano; A. Uranga; E. Figueras; J. Montserrat; J. Esteve; Anja Boisen; N. Barniol

System on chip mass sensor based on polysilicon cantilevers arrays for multiple detection

M. Villarroya, J. Verd, J. Teva, G. Abadal, Esko Sebastian Forsén, F. Perez-Murano, A. Uranga, E. Figueras, J. Montserrat, J. Esteve, Anja Boisen, N. Barniol

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Sensors and Actuators A: Physical
Volume	132
Issue number	1
Pages (from-to)	154-164
ISSN	0924-4247
Publication status	Published - 2006

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@article{bc0abd78404b40fb8b1b507968e71090,

title = "System on chip mass sensor based on polysilicon cantilevers arrays for multiple detection",

author = "M. Villarroya and J. Verd and J. Teva and G. Abadal and Fors{\'e}n, {Esko Sebastian} and F. Perez-Murano and A. Uranga and E. Figueras and J. Montserrat and J. Esteve and Anja Boisen and N. Barniol",

year = "2006",

language = "English",

volume = "132",

pages = "154--164",

journal = "Sensors and Actuators A: Physical",

issn = "0924-4247",

publisher = "Elsevier",

number = "1",

}

System on chip mass sensor based on polysilicon cantilevers arrays for multiple detection. / Villarroya, M.; Verd, J.; Teva, J.; Abadal, G.; Forsén, Esko Sebastian; Perez-Murano, F.; Uranga, A.; Figueras, E.; Montserrat, J.; Esteve, J.; Boisen, Anja; Barniol, N.

In: Sensors and Actuators A: Physical, Vol. 132, No. 1, 2006, p. 154-164.

Research output: Contribution to journal › Journal article › Research › peer-review

TY - JOUR

T1 - System on chip mass sensor based on polysilicon cantilevers arrays for multiple detection

AU - Villarroya, M.

AU - Verd, J.

AU - Teva, J.

AU - Abadal, G.

AU - Forsén, Esko Sebastian

AU - Perez-Murano, F.

AU - Uranga, A.

AU - Figueras, E.

AU - Montserrat, J.

AU - Esteve, J.

AU - Boisen, Anja

AU - Barniol, N.

PY - 2006

Y1 - 2006

M3 - Journal article

VL - 132

SP - 154

EP - 164

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

SN - 0924-4247

IS - 1

ER -