System-Level Modelling and Simulation of MEMS-Based Sensors

Kashif M. Virk, Jan Madsen, Mohammad Shafique, Aric Kumaran Menon

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    The growing complexity of MEMS devices and their increased used in embedded systems (e.g., wireless integrated sensor networks) demands a disciplined aproach for MEMS design as well as the development of techniques for system-level modeling of these devices so that a seamless integration with the existing embedded system design methodologies is possible. In this paper, we present a MEMS design methodology that uses VHDL-AMS based system-level model of a MEMS device as a starting point and combines the top-down and bottom-up design approaches for design, verification, and optimization. The capabilities of our proposed design methodology are illustrated through the design of a microaccelerometer.
    Original languageEnglish
    Title of host publication9th IEEE International Multi-Topic Conference (INMIC)
    Publication date2005
    ISBN (Print)0-7803-9429-1
    Publication statusPublished - 2005
    Event9th IEEE International Multi Topic Conference - Karachi, Pakistan
    Duration: 23 Dec 200525 Dec 2005
    Conference number: 9


    Conference9th IEEE International Multi Topic Conference
    Internet address

    Bibliographical note

    Copyright: 2005 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE


    • VHDL-AMS
    • Reduced-Order Model
    • Sensors
    • MEMS
    • SystemC
    • ystem-Level Model
    • Microaccelerometer
    • Wireless Sensor Networks


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