System-Level Modelling and Simulation of MEMS-Based Sensors

Kashif M. Virk; Jan Madsen; Mohammad Shafique; Aric Kumaran Menon

doi:10.1109/INMIC.2005.334503

System-Level Modelling and Simulation of MEMS-Based Sensors

Kashif M. Virk, Jan Madsen, Mohammad Shafique, Aric Kumaran Menon

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Abstract

The growing complexity of MEMS devices and their increased used in embedded systems (e.g., wireless integrated sensor networks) demands a disciplined aproach for MEMS design as well as the development of techniques for system-level modeling of these devices so that a seamless integration with the existing embedded system design methodologies is possible. In this paper, we present a MEMS design methodology that uses VHDL-AMS based system-level model of a MEMS device as a starting point and combines the top-down and bottom-up design approaches for design, verification, and optimization. The capabilities of our proposed design methodology are illustrated through the design of a microaccelerometer.

Original language	English
Title of host publication	9th IEEE International Multi-Topic Conference (INMIC)
Publisher	IEEE
Publication date	2005
ISBN (Print)	0-7803-9429-1
DOIs	https://doi.org/10.1109/INMIC.2005.334503
Publication status	Published - 2005
Event	9th IEEE International Multi Topic Conference - Karachi, Pakistan Duration: 23 Dec 2005 → 25 Dec 2005 Conference number: 9 https://ieeexplore.ieee.org/xpl/conhome/4133396/proceeding

Conference

Conference	9th IEEE International Multi Topic Conference
Number	9
Country/Territory	Pakistan
City	Karachi
Period	23/12/2005 → 25/12/2005
Internet address	https://ieeexplore.ieee.org/xpl/conhome/4133396/proceeding

Bibliographical note

Copyright: 2005 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

Keywords

VHDL-AMS
Reduced-Order Model
Sensors
MEMS
SystemC
ystem-Level Model
Microaccelerometer
Wireless Sensor Networks

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10.1109/INMIC.2005.334503

MadsenFinal published version, 6.92 MB

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title = "System-Level Modelling and Simulation of MEMS-Based Sensors",

abstract = "The growing complexity of MEMS devices and their increased used in embedded systems (e.g., wireless integrated sensor networks) demands a disciplined aproach for MEMS design as well as the development of techniques for system-level modeling of these devices so that a seamless integration with the existing embedded system design methodologies is possible. In this paper, we present a MEMS design methodology that uses VHDL-AMS based system-level model of a MEMS device as a starting point and combines the top-down and bottom-up design approaches for design, verification, and optimization. The capabilities of our proposed design methodology are illustrated through the design of a microaccelerometer.",

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note = "Copyright: 2005 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE; 9th IEEE International Multi Topic Conference, INMIC 2005 ; Conference date: 23-12-2005 Through 25-12-2005",

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AU - Shafique, Mohammad

AU - Menon, Aric Kumaran

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KW - MEMS

KW - SystemC

KW - ystem-Level Model

KW - Microaccelerometer

KW - Wireless Sensor Networks

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DO - 10.1109/INMIC.2005.334503

M3 - Article in proceedings

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T2 - 9th IEEE International Multi Topic Conference

Y2 - 23 December 2005 through 25 December 2005

ER -

System-Level Modelling and Simulation of MEMS-Based Sensors

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Keywords

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