Suspended channel MEMS fabrication process for advanced device design and Bio-analytical functionalization

Alexander Grigorov

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalMicroelectronic Engineering
    Volume85
    Pages (from-to)2290-2298
    ISSN0167-9317
    DOIs
    Publication statusPublished - 2008

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