Suspended channel MEMS fabrication process for advanced device design and Bio-analytical functionalization

Alexander Grigorov

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Microelectronic Engineering
Volume	85
Pages (from-to)	2290-2298
ISSN	0167-9317
DOIs	https://doi.org/10.1016/j.mee.2008.07.015
Publication status	Published - 2008

Access to Document

@article{36d88d091cca4d908cbe562435dfed95,

title = "Suspended channel MEMS fabrication process for advanced device design and Bio-analytical functionalization",

author = "Alexander Grigorov",

year = "2008",

doi = "10.1016/j.mee.2008.07.015",

language = "English",

volume = "85",

pages = "2290--2298",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

}