Original language | English |
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Journal | Microelectronic Engineering |
Volume | 85 |
Pages (from-to) | 2290-2298 |
ISSN | 0167-9317 |
DOIs | |
Publication status | Published - 2008 |
Suspended channel MEMS fabrication process for advanced device design and Bio-analytical functionalization
Alexander Grigorov
Research output: Contribution to journal › Journal article › Research › peer-review