TY - JOUR
T1 - Surfaces in Precision Engineering, Microengineering and Nanotechnology
AU - De Chiffre, Leonardo
AU - Kunzmann, H.
AU - Peggs, G. N.
AU - Lucca, D.A.
PY - 2003
Y1 - 2003
N2 - This paper addresses the role of surfaces at the micrometric and nanometric length scales. Applications,
functional behaviour, and manufacturing issues are reviewed with respect to state-of-the-art and emerging
products fabricated using high precision technologies. Examples of surfaces obtained with precision
engineering, microengineering and nanotechnology are presented, encompassing surfaces in computers,
MEMS, biomedical systems, light and X-ray optics, as well as in chemical systems. Surface properties at
micro and nanoscale are considered, including geometry as well as physical and chemical properties.
Different manufacturing processes are reviewed with respect to surface fabrication, encompassing
conventional machining, microfabrication, and nanomanipulation. Surface metrology at micro and nanoscale
is briefly addressed, and its fundamental importance strongly emphasized.
AB - This paper addresses the role of surfaces at the micrometric and nanometric length scales. Applications,
functional behaviour, and manufacturing issues are reviewed with respect to state-of-the-art and emerging
products fabricated using high precision technologies. Examples of surfaces obtained with precision
engineering, microengineering and nanotechnology are presented, encompassing surfaces in computers,
MEMS, biomedical systems, light and X-ray optics, as well as in chemical systems. Surface properties at
micro and nanoscale are considered, including geometry as well as physical and chemical properties.
Different manufacturing processes are reviewed with respect to surface fabrication, encompassing
conventional machining, microfabrication, and nanomanipulation. Surface metrology at micro and nanoscale
is briefly addressed, and its fundamental importance strongly emphasized.
KW - MM03.35
U2 - 10.1016/S0007-8506(07)60204-2
DO - 10.1016/S0007-8506(07)60204-2
M3 - Journal article
SN - 0007-8506
VL - 52
SP - 561
EP - 577
JO - CIRP Annals : Manufacturing Technology
JF - CIRP Annals : Manufacturing Technology
IS - 2
ER -