Surface replication assessment of sub-µm structures by atomic force microscopy

Matteo Calaon, Guido Tosello, P.T. Tang, J. Nørregaard, J. Garnaes, Hans Nørgaard Hansen

Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

Original languageEnglish
Publication date2013
Number of pages1
Publication statusPublished - 2013
EventEUSPEN Micro/Nano Manufacturing Workshop - Karlsruhe, Germany
Duration: 27 Nov 201328 Nov 2013

Workshop

WorkshopEUSPEN Micro/Nano Manufacturing Workshop
CountryGermany
CityKarlsruhe
Period27/11/201328/11/2013

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