Surface micromachined scanning mirrors

Kent Erik Mattsson

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    Both aluminum cantilever and torsional scanning mirrors have been fabricated and their static and dynamic properties are studied experimentally and theoretically. The experiments showed resonance frequencies in the range of 163 k-Hz - 632 kHz for cantilever beams with Q values between 5 and 11. Torsional mirrors showed resonance frequencies in the range of 410 kHz - 667 kHz with Q values of 10 - 17. All measurements performed at atmospheric pressure. Both types of mechanical structures were deflected electrostatically at large angles (± 5°) more than 1011 times without breaking and without any noticeable deterioration due to fatigue. A number of different light modulator arrays made up of adjacent devices was investigated and the measured performance parameters were in good agreement with calculations.
    Original languageEnglish
    Title of host publicationProceedings of the 22nd European Solid State Device Research Conference
    Publication date1992
    ISBN (Print)0444894780
    Publication statusPublished - 1992
    Event22nd European Solid State Device Research Conference - Leuven, Belgium
    Duration: 14 Sep 199217 Sep 1992
    Conference number: 22


    Conference22nd European Solid State Device Research Conference
    Internet address

    Bibliographical note

    Copyright: 1992 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE


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