Surface Mapping with an AFM-CMM Integrated System and Stitching Software

Leonardo De Chiffre, Francesco Marinello, Paolo Bariani, Hans Nørgaard Hansen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review


    In the context of micro-technology, dimensions in the order of hundreds of micrometers are often to be measured, while the detection of the finest details and the analysis of nano-roughness call for the use of highly resolving sensors. AFM probes, owing to the sharpness of their tip combined with piezoelectric actuation, provide sub nanometre vertical resolution and a few nanometres lateral resolution. On the other hand, the scanning range is limited to few hundred micrometers. In this respect, mapping is a solution. During the past few years, an integrated instrument has been developed at IPL based on an AFM scanner mounted on the z axis of a three axes CMM (1) . The instrument is now equipped with an AFM scanner DME DS 95–200 characterized by a scanning range of 200X200 microns2. In the paper the development and implementation of a stitching procedure for surface mapping is presented and discussed.
    Original languageEnglish
    Title of host publicationProc. of 4th euspen Int. Conference
    Place of PublicationKempston
    PublisherLG Digital
    Publication date2004
    Publication statusPublished - 2004
    Event4th EUSPEN International Conference - Glasgow, United Kingdom
    Duration: 30 May 20043 Jun 2004
    Conference number: 4


    Conference4th EUSPEN International Conference
    Country/TerritoryUnited Kingdom


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