Surface correlation function analysis of high resolution scattering data from mirrored surfaces obtained using a triple-axis X-ray diffractometer

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Within various X-ray programs there exists a need for a detailed investigation of the surface roughness of mirrored surfaces over a wide spatial wavelength bandwidth, ranging from large scale figure error to microroughness. A number of methods exist to measure the surface roughness. Common to all methods is that they are bandwidth-limited. A crucial point in the analysis of data is, therefore, to specify accurately the wavelength bandwidth limitation and to determine the surface autocorrelation function within this bandwidth. The authors present a number of scattering measurements obtained using a triple-axis perfect-crystal X-ray diffractometer and the results of an autocorrelation function analysis. Furthermore, they present some measurements of integrated reflectivity, which they believe provide evidence for microroughness in the range from a few angstroms to tens of microns
Original languageEnglish
JournalApplied Optics
Issue number8
Pages (from-to)1548-1557
Publication statusPublished - 1988

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