Surface composition and morphology of chemical beam epitaxy grown GaN thin films

Esther Kim, I. Berishev, A. Bensaoula, Seunghwan Lee, S. S. Perry, K. Waters, A. Schultz

Research output: Contribution to journalJournal articleResearchpeer-review

Original languageEnglish
JournalJournal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures
Volume16
Issue number3
Pages (from-to)1270-1274
ISSN1071-1023
Publication statusPublished - 1998
Externally publishedYes

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