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Superparamagnetic photocurable nanocomposite for the fabrication of microcantilevers

  • M Suter
  • , O Ergeneman
  • , J Zürcher
  • , Silvan Schmid
  • , A Camenzind
  • , B J Nelson
  • , C Hierold
    • Swiss Federal Institute of Technology Zurich

    Research output: Contribution to journalJournal articleResearchpeer-review

    Abstract

    We present a photocurable polymer composite with superparamagnetic characteristics for the fabrication of microcantilevers. Uniform distribution and low particle agglomeration (

    Original languageEnglish
    JournalJournal of Micromechanics and Microengineering
    Volume21
    Issue number2
    Pages (from-to)025023
    ISSN0960-1317
    DOIs
    Publication statusPublished - 2011

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