Superparamagnetic photocurable nanocomposite for the fabrication of microcantilevers

M Suter, O Ergeneman, J Zürcher, Silvan Schmid, A Camenzind, B J Nelson, C Hierold

    Research output: Contribution to journalJournal articleResearchpeer-review

    Abstract

    We present a photocurable polymer composite with superparamagnetic characteristics for the fabrication of microcantilevers. Uniform distribution and low particle agglomeration (

    Original languageEnglish
    JournalJournal of Micromechanics and Microengineering
    Volume21
    Issue number2
    Pages (from-to)025023
    ISSN0960-1317
    DOIs
    Publication statusPublished - 2011

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