Abstract
We present a photocurable polymer composite with superparamagnetic characteristics for the fabrication of microcantilevers. Uniform distribution and low particle agglomeration (
Original language | English |
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Journal | Journal of Micromechanics and Microengineering |
Volume | 21 |
Issue number | 2 |
Pages (from-to) | 025023 |
ISSN | 0960-1317 |
DOIs | |
Publication status | Published - 2011 |