Sub-micrometer waveguide for nano-optics

Karsten Rottwitt, Morten Glarborg Dyndgaard, Karin Nordström Andersen, T.B. Hansen

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    Abstract

    With the recent progress within the field of processing nano structures, there is an increasing interest in coupling light into such structures both for characterization of optical properties and new optical components. In this work we propose the use of a sub-micrometer planar waveguide for probing the reflection of light against a nano structure. The planar waveguide is based on a silicon nitride core layer, surrounded by a silica cladding region. In our design we utilize this waveguide to couple light into a nano-structure.
    Original languageEnglish
    Title of host publicationCLEO/Europe
    Number of pages696
    PublisherIEEE
    Publication date2003
    PagesCM3-T
    ISBN (Print)0-7803-7734-6
    DOIs
    Publication statusPublished - 2003
    Event2003 Conference on Lasers and Electro-Optics Europe - Munich, Germany
    Duration: 22 Jun 200327 Jun 2003
    https://ieeexplore.ieee.org/xpl/conhome/9180/proceeding

    Conference

    Conference2003 Conference on Lasers and Electro-Optics Europe
    Country/TerritoryGermany
    CityMunich
    Period22/06/200327/06/2003
    Internet address

    Bibliographical note

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